@misc{778276,
  author = {Stephen Knight and Joaquin Martinez and Michele Buckley},
  title = {Semiconductor Microelectornics and Nanoelectronics Programs},
  year = {2006},
  month = {2006-07-05 00:07:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32371},
  doi = {https://doi.org/10.6028/NIST.IR.7321},
  language = {en},
}