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Semiconductor Measurement Technology: User's Manual for the Program MONSEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology

Published

Author(s)

J R. Lowney, E Marx
Citation
Special Publication (NIST SP) -

Citation

Lowney, J. and Marx, E. (1994), Semiconductor Measurement Technology: User's Manual for the Program MONSEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed April 14, 2024)
Created August 31, 1994, Updated October 12, 2021