Lowney, J.
and Marx, E.
(1994),
Semiconductor Measurement Technology: User's Manual for the Program MONSEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed April 24, 2024)
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Semiconductor Measurement Technology: User's Manual for the Program MONSEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology
Published
Author(s)
, E Marx
Citation
Special Publication (NIST SP) -
NIST Pub Series
Pub Type
NIST Pubs
Citation
Created August 31, 1994, Updated October 12, 2021