TY  - GEN
AU  - J Lowney
AU  - E Marx
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1994-09-01 00:09:00
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1994
TI  - Semiconductor Measurement Technology: User's Manual for the Program MONSEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology
ER  -