@misc{776221,
  author = {J Lowney and E Marx},
  title = {Semiconductor Measurement Technology: User's Manual for the Program MONSEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology},
  year = {1994},
  month = {1994-09-01 00:09:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}