Cassard, J.
and Mattis, R.
(1992),
Semiconductor Measurement Technology: Evaluating a Chip, Wafer, or Lot Using SUXES, SPICE, and STAT2, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed March 13, 2025)
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Semiconductor Measurement Technology: Evaluating a Chip, Wafer, or Lot Using SUXES, SPICE, and STAT2
Published
Author(s)
, R. L. Mattis
Citation
Special Publication (NIST SP) -
NIST Pub Series
Pub Type
NIST Pubs
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created March 31, 1992, Updated October 12, 2021