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Semiconductor Measurement Technology: Evaluating a Chip, Wafer, or Lot Using SUXES, SPICE, and STAT2

Published

Author(s)

Janet M. Cassard, R. L. Mattis
Citation
Special Publication (NIST SP) -

Citation

Cassard, J. and Mattis, R. (1992), Semiconductor Measurement Technology: Evaluating a Chip, Wafer, or Lot Using SUXES, SPICE, and STAT2, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed April 20, 2024)
Created March 31, 1992, Updated October 12, 2021