@misc{753816,
  author = {Janet Cassard and R. Mattis},
  title = {Semiconductor Measurement Technology: Evaluating a Chip, Wafer, or Lot Using SUXES, SPICE, and STAT2},
  year = {1992},
  month = {1992-04-01 00:04:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}