TY  - GEN
AU  - Janet Cassard
AU  - R. Mattis
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1992-04-01 00:04:00
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1992
TI  - Semiconductor Measurement Technology: Evaluating a Chip, Wafer, or Lot Using SUXES, SPICE, and STAT2
ER  -