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Semiconductor Factory and Equipment Clock Synchronization for e-Manufacturing



Ya-Shian Li-Baboud, Brad Van Eck


This study describes the potential methods, challenges, and recommendations for addressing factory and equipment clock synchronization and time stamping. The report also discusses why these are critical to the industry as the upcoming generations of tools and fabrication facilities are being designed and constructed. It will also recommend areas for standardization and best practices for clock synchronization and time stamping.
NIST Interagency/Internal Report (NISTIR) - 7184
Report Number


Automated Data Collection, Distributed Systems, IEEE 1588, Network Time Protocol, Time Stamping, Time Synchronization


Li-Baboud, Y. and Van Eck, B. (2004), Semiconductor Factory and Equipment Clock Synchronization for e-Manufacturing, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], (Accessed June 20, 2024)


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Created December 14, 2004, Updated October 12, 2021