Li-Baboud, Y.
and Van Eck, B.
(2004),
Semiconductor Factory and Equipment Clock Synchronization for e-Manufacturing, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31856
(Accessed October 13, 2025)
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Semiconductor Factory and Equipment Clock Synchronization for e-Manufacturing
Published
Author(s)
, Brad Van Eck
Abstract
This study describes the potential methods, challenges, and recommendations for addressing factory and equipment clock synchronization and time stamping. The report also discusses why these are critical to the industry as the upcoming generations of tools and fabrication facilities are being designed and constructed. It will also recommend areas for standardization and best practices for clock synchronization and time stamping.Citation
NIST Interagency/Internal Report (NISTIR) - 7184
Report Number
7184
NIST Pub Series
Pub Type
NIST Pubs
Download Paper
Keywords
Automated Data Collection, Distributed Systems, IEEE 1588, Network Time Protocol, Time Stamping, Time Synchronization
Citation
Issues
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Created December 14, 2004, Updated October 12, 2021