@misc{773056,
  author = {Ya-Shian Li-Baboud and Brad Van Eck},
  title = {Semiconductor Factory and Equipment Clock Synchronization for e-Manufacturing},
  year = {2004},
  month = {2004-12-15 00:12:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31856},
  language = {en},
}