TY  - GEN
AU  - Ya-Shian Li-Baboud
AU  - Brad Van Eck
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2004-12-15 00:12:00
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2004
TI  - Semiconductor Factory and Equipment Clock Synchronization for e-Manufacturing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31856
ER  -