June 24, 2010
Author(s)
Brent A. Sperling, William A. Kimes, James E. Maslar, Pamela M. Chu
In this work, we develop a Fourier transform infrared spectroscopy-based method to measure the gas-phase dynamics occurring during atomic layer deposition of hafnium oxide using tetrakis (ethylmethylamido) hafnium and water vapor. We take advantage of the