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Search Publications by: Heather J. Patrick (Fed)

Displaying 26 - 27 of 27

The Limits of Image-Based Optical Metrology

March 1, 2006

Author(s)

Richard M. Silver, Bryan M. Barnes, Ravikiran Attota, Jay S. Jun, James J. Filliben, Juan Soto, Michael T. Stocker, P Lipscomb, Egon Marx, Heather J. Patrick, Ronald G. Dixson, Robert D. Larrabee

An overview of the challenges encountered in imaging device-sized features using optical techniques recently developed in our laboratories is presented in this paper. We have developed a set of techniques we refer to as scatterfield microscopy which allows

Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie

January 1, 2006

Author(s)

Heather J. Patrick, R Attota, Thomas A. Germer, M Stocker, R M. Silver

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