Patrick, H.
, Attota, R.
, Germer, T.
, Stocker, M.
and Silver, R.
(2006),
Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie, Metrology Pages Inspection Pages and Process Control for Microlithography XX SPIE
(Accessed December 5, 2024)
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Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie
Published
Author(s)
, R Attota, , M Stocker, R M. Silver
Citation
Metrology Pages Inspection Pages and Process Control for Microlithography XX SPIE
Volume
6152
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2006, Updated February 17, 2017