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Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie

Published

Author(s)

Heather J. Patrick, R Attota, Thomas A. Germer, M Stocker, R M. Silver
Citation
Metrology Pages Inspection Pages and Process Control for Microlithography XX SPIE
Volume
6152

Citation

Patrick, H. , Attota, R. , Germer, T. , Stocker, M. and Silver, R. (2006), Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie, Metrology Pages Inspection Pages and Process Control for Microlithography XX SPIE (Accessed February 25, 2024)
Created January 1, 2006, Updated February 17, 2017