@article{124656,
  author = {Heather Patrick and R Attota and Thomas Germer and M Stocker and R Silver},
  title = {Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie},
  year = {2006},
  number = {6152},
  month = {2006-01-01},
  publisher = {Metrology Pages Inspection Pages and Process Control for Microlithography XX SPIE},
  language = {en},
}