Allen, R.
, Patrick, H.
, Bishop, M.
and Germer, T.
(2007),
Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications, 2007 IEEE International Conference on Microelectronic Test Structures , Tokyo, 1, JA
(Accessed April 26, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications
Published
Author(s)
R A. Allen, , M Bishop,
Proceedings Title
2007 IEEE International Conference on Microelectronic Test Structures
Conference Dates
March 19-22, 2007
Conference Location
Tokyo, 1, JA
Conference Title
Conference Proceedings
Pub Type
Conferences
Citation
Created December 31, 2006, Updated October 12, 2021