NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications

Published

Author(s)

R A. Allen, Heather Patrick, M Bishop, Thomas Germer
Proceedings Title
2007 IEEE International Conference on Microelectronic Test Structures
Conference Dates
March 19-22, 2007
Conference Location
Tokyo, 1, JA
Conference Title
Conference Proceedings
Pub Type
Conferences

Citation

Allen, R. , Patrick, H. , Bishop, M. and Germer, T. (2007), Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications, 2007 IEEE International Conference on Microelectronic Test Structures , Tokyo, 1, JA (Accessed October 18, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 31, 2006, Updated October 12, 2021
Was this page helpful?