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Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications

Published

Author(s)

R A. Allen, Heather Patrick, M Bishop, Thomas Germer
Proceedings Title
2007 IEEE International Conference on Microelectronic Test Structures
Conference Dates
March 19-22, 2007
Conference Location
Tokyo, 1, JA
Conference Title
Conference Proceedings

Citation

Allen, R. , Patrick, H. , Bishop, M. and Germer, T. (2007), Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications, 2007 IEEE International Conference on Microelectronic Test Structures , Tokyo, 1, JA (Accessed June 17, 2024)

Issues

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Created December 31, 2006, Updated October 12, 2021