Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications

Published

Author(s)

R A. Allen, Heather Patrick, M Bishop, Thomas Germer
Proceedings Title
2007 IEEE International Conference on Microelectronic Test Structures
Conference Dates
March 19-22, 2007
Conference Location
Tokyo, 1, JA
Conference Title
Conference Proceedings

Citation

Allen, R. , Patrick, H. , Bishop, M. and Germer, T. (2007), Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications, 2007 IEEE International Conference on Microelectronic Test Structures , Tokyo, 1, JA (Accessed November 8, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2006, Updated October 12, 2021