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Search Publications by: Jae Hyun Kim (Fed)

Displaying 76 - 78 of 78

Measurement of the 100 nm NIST SRM 1963 by Laser Surface Light Scattering

November 1, 2002

Author(s)

Thomas A. Germer, George W. Mulholland, Jae Hyun Kim, S H. Ehrman

Accurate sizing of particles deposited on surfaces is important for the semiconductor, optical, and data storage industries. The recent availability of accurate light scattering models for non-ideal conditions enables the determination of particle size

Polarized Light Scattering by Dielectric and Metallic Spheres on Silicon Wafers

September 1, 2002

Author(s)

Jae H. Kim, S H. Ehrman, George W. Mulholland, Thomas Germer

The Polarization and intensity of light scattered by monodisperse polystyrene latex and copper spheres, with diameters ranging from 92 to 218 nm, deposited on silicon substrates were measured with 442-, 532-, and 633-nm light. The results are compared with

Polarized Light Scattering From Metallic Particles on Silicon Wafers

December 1, 2001

Author(s)

Jae H. Kim, S H. Ehrman, George W. Mulholland, Thomas Germer

Polarized light scattering by monodisperse copper and gold spheres, having diameters ranging from 96 nm to 205 nm deposited on silicon substrates were measured using visible light. The results are compared to an exact theory for scattering by a sphere on a

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