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Publications

Search Publications by David A. Wollman

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Displaying 26 - 50 of 71

NIST Accomplishments in Nanotechnology

January 1, 2006
Author(s)
Michael T. Postek, Joseph J. Kopanski, David A. Wollman
This document includes a list of selected NIST accomplishments in nanotechnology for the period of fiscal years 2004 and 2005. These accomplishments are grouped into the NNI s Program Component Areas (PCAs), which are defined in the text. The NNI has

Electron Probe Microanalysis with Cryogenic Detectors

July 9, 2005
Author(s)
Dale E. Newbury, Kent D. Irwin, Gene C. Hilton, David A. Wollman, John A. Small, John M. Martinis
Electron probe x-ray microanalysis is based upon the use of a focused, high current density electron beam, 5 keV to 30 keV in energy, to excite characteristic x-rays from a picogram mass of a solid target. X-ray spectral measurements are currently

Electron Probe Microanalysis

January 1, 2005
Author(s)
Dale Newbury, Kent D. Irwin, Gene C. Hilton, David A. Wollman, John A. Small, John M. Martinis

Energy Dispersive X-ray spectromety by Microcalorimetry for the SEM

January 1, 2002
Author(s)
Dale E. Newbury, David A. Wollman, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, John A. Small, John M. Martinis
Analytical x-ray spectrometry for electron beam instruments has been significantly advanced with the development of the NIST microcalorimeter energy dispersive x-ray spectrometer (mcal EDS). The mcal EDS operates by measuring the temperature rise when a

TES Detector Noise Limited Readout Using SQUID Multiplexers

January 1, 2002
Author(s)
Johannes G. Staguhn, C. A. Allen, D. J. Benford, James A. Chervenak, M. M. Freund, S. A. Khan, A. S. Kutyrev, S. H. Mosely, Rick A. Shafer, Steven Deiker, Erich N. Grossman, Gene C. Hilton, Kent D. Irwin, John M. Martinis, Sae Woo Nam, David A. Rudman, David A. Wollman
The availability of superconducting Transition Edge Sensors (TES) with large numbers of individual detector pixels requires multiplexers for efficient readout. The usage of multiplexers limits the number of wires needed between the cryogenic electronics

Progress Towards Arrays of Microcalorimeter X-ray Detectors

September 1, 2001
Author(s)
Sae Woo Nam, David A. Wollman, Dale Newbury, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Steven Deiker, Norman F. Bergren, John M. Martinis
The high performance of single-pixel microcalorimeter EDS (υcal EDS) has been shown to be very useful for a variety of microanalysis cases. The primary advantage of υcal EDS over conventional EDS is that factor of 25 improvement in energy resolution (3 eV

High Performance Transition-Edge-Sensor Based Detectors

June 1, 2001
Author(s)
Gene C. Hilton, Steven Deiker, Kent D. Irwin, Sae Woo Nam, John M. Martinis, David A. Wollman
High performance detectors utilizing transition-edge sensors (TES) have been demonstrated for photon energies ranging from the infrared to the x-ray. In the soft x-ray band we have demonstrated the highest energy resolution yet achieved for any energy

Microfabricated Transition-Edge X-ray Detectors

March 1, 2001
Author(s)
Gene C. Hilton, John M. Martinis, Kent D. Irwin, Norman F. Bergren, David A. Wollman, Martin Huber, Sae Woo Nam
We are developing high performance x-ray detectors based on superconducting transition-edge sensors (TES) for application in materials analysis and astronomy. Using our recently developed fully lithographic TES fabrication process, we have made devices

Transition Edge Sensor Array Development

March 1, 2001
Author(s)
Steven Deiker, James A. Chervenak, Gene C. Hilton, Kent D. Irwin, John M. Martinis, Sae Woo Nam, David A. Wollman
NIST is fabricating multi-pixel arrays of our transition edge sensor (TES) microcalorimeter detectors for use in microanalysis and x-ray astrophysics. We have developed room temperature digital feedback electronics and a successful SQUID multiplexing

Energy Dispersive X-ray Analysis using a Microcalorimeter Detector

January 29, 2001
Author(s)
W. Harris, L. Le Tarte, H. Bakhru, W. Gibson, D. Wu, Robert E. Geer, David A. Wollman
Energy dispersive X-ray analysis (EDX) is widely used within the semiconductor community for chemical analysis and identification of features observed in scanning electron microscopy images. While this technique provides valuable information for defect

Low Voltage Microanalysis using Microcalorimeter EDS

January 1, 2001
Author(s)
David A. Wollman, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Norman F. Bergren, Steven Deiker, John M. Martinis, Martin Huber, Dale Newbury
We present the current performance of the prototype high-resolution microcalorimeter energy-dispersive spectrometer (υcal EDS) developed at NIST for x-ray microanalysis. In particular, the low-energy υcal EDS designed for operation in the energy range from

A Mo-Cu Superconducting Transition-Edge Microcalorimeter with 4.5 eV Energy Resolution at 6 keV

December 31, 2000
Author(s)
Kent D. Irwin, Gene C. Hilton, John M. Martinis, Steven Deiker, Norman F. Bergren, Sae Woo Nam, David A. Rudman, David A. Wollman
We describe a superconducting transition-edge microcalorimeter with an energy resolution of 4.5 1 0.1 eV full-width at half-maximum (FWHM) for Mn Kα X-rays from an 55Fe source. The thermometer consists of a photolithographically patterned Mo-Cu

Superconducting Transition-Edge-Microcalorimeter X-ray Spectrometer with 2 eV Energy Resolution at 1.5 keV

December 31, 2000
Author(s)
David A. Wollman, Sae Woo Nam, Dale Newbury, Gene C. Hilton, Kent D. Irwin, Norman F. Bergren, Steven Deiker, David A. Rudman, John M. Martinis
We describe the operation and performance of a prototype microcalorimeter ?energy-dispersive? (nondispersive) x-ray spectrometer (mcal EDS) developed at NIST for use in x-ray microanalysis and x-ray astronomy. The low-energy microcalorimeter detector

Development of Arrays of TES X-ray Detectors

December 1, 2000
Author(s)
Steven Deiker, James A. Chervenak, Gene C. Hilton, Martin Huber, Kent D. Irwin, John M. Martinis, Sae Woo Nam, David A. Wollman
Both the x-ray astrophysics and microanalysis communities have a need for large format arrays of high-spectral-resolution x-ray detectors. To meet this need, we are transferring our successful single pixel Transition Edge Sensor (TES) x-ray

Microcalorimeter Energy Dispersive X-ray Spectrometer for Low Voltage Microanalysis

November 1, 2000
Author(s)
David A. Wollman, John M. Martinis, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Norman F. Bergren, Steven Deiker, Martin Huber, Dale Newbury
Improved x-ray detector technology continues to be a critical metrological need in the semiconductor industry for contaminant particle analysis1,2 and for high-spatial-resolution x-ray microanalysis using low-beam-voltage field-emission scanning electron

Comparison of Elemental Detection Using Microcalorimetry, SIMS, AES and EDS (SEM, STEM, and TEM)

August 1, 2000
Author(s)
C. B. Vartuli, F. A. Stevie, David A. Wollman, M. Antonell, R. B. Irwin, J. M. McKinley, T L. Shofner, B. M. Purcell, S. A. Anderson, Bobby To
Cu contamination has become a larger concern as more semiconductor fabrication facilities switch from aluminum to Cu interconnects. The resolution limits of several analytical tools are compared to determine the optimum analysis methods for detecting Cu

Microcalorimeter EDS: Benefits and Drawbacks

August 1, 2000
Author(s)
David A. Wollman, Dale Newbury, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Steven Deiker, Norman F. Bergren, John M. Martinis
The commercial introduction of high-count-rate, near-room-temperature silicon drift detectors (presently available) and high-energy-resolution cryogenic microcalorimeters (forthcoming) is an exciting development in x-ray microanalysis, in which detector

Microcalorimeter Energy-Dispersive Spectrometry Using a Low Voltage Scanning Electron Microscope

July 1, 2000
Author(s)
David A. Wollman, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, Norman F. Bergren, David A. Rudman, John M. Martinis, Dale Newbury
We describe the current performance of the prototype microcalorimeter energy-dispersive spectrometer (5cal EDS) developed at NIST for X-ray microanalysis. We show that the low-energy 5cal EDS, designed for operation in the energy range 0.2-2 keV, offers

The Approaching Revolution in X-Ray Microanalysis: The Microcalorimeter Energy Dispersive Spectrometer

June 1, 2000
Author(s)
Dale E. Newbury, David A. Wollman, Gene C. Hilton, Kent D. Irwin, Norman F. Bergren, David A. Rudman, John M. Martinis
We have developed a high-resolution energy-dispersive x-ray spectrometer (EDS) based on cryogenic microcalorimeter x-ray detectors for use in x-ray microanalysis. With an energy resolution of 3 eV at 1.5 keV, count rate of {approximately} 500 s-1, and an