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Displaying 26 - 50 of 62

Atomic-Resolution Measurements With a New Tunable Diode Laser-Based Interferometer

January 1, 2004
Author(s)
Richard M. Silver, H Zou, S Gonda, Bradley N. Damazo, Jay S. Jun, Carsten P. Jensen, Lowell P. Howard
We have developed a new implementation of a Michelson interferometer which has demonstrated better than 20 picometer resolution measurement capability. This new method uses a tunable diode laser as the light source with the laser wavelength continuously

Performance Evaluation of a Prototype Machine Tool for Machining Meso-scaled Parts

January 1, 2003
Author(s)
Bradley N. Damazo, M A. Donmez, Michael L. McGlauflin, J B. Werkmeister, Johannes A. Soons, S C. Bryant, Alex Slocum
With the increased prevalence of meso-scaled products and feature sizes, new tools are needed to bridge the gap between fabrication processes tailored for micrometer and millimeter sized features [1-4]. Compared to its traditional counterpart, a small

A Macro-Micro Motion System for a STM

June 13, 2002
Author(s)
Bradley N. Damazo, James D. Gilsinn, Richard M. Silver, Hui Zhou
As nano-lithography improves, more companies and research groups have the capability to create nano-scale structures. Scanning Tunneling Microscopes (STMs) are commonly used to create these structures and evaluate them afterward. One difficulty is that

Nanomanufacturing of Atom-Based Dimensional Standards - A Final Project Report of the NAMT

January 1, 2002
Author(s)
Robert Allen, J J. Pellegrino, D Monk, E C. Teague, Dennis A. Swyt, Joseph Fu, Richard M. Silver, Theodore V. Vorburger, Bradley N. Damazo, Robert Russell, Thomas E. Wheatley, Keith A. Stouffer, Manfred Osti, David Wilmering, Richard L. Rhorer, Ram D. Sriram
This report describes the accomplishments of the Nanomanufacturing of Atom-based Dimensional Standards Project, which operated as part of the National Advanced Manufacturing Testbed (NAMT) a program formally operating from fiscal year (FY) 1996 to FY 2000

SEM Sentinel-SEM Performance Measurement System

August 1, 2001
Author(s)
Bradley N. Damazo, Andras Vladar, Alice V. Ling, Alkan Donmez, Michael T. Postek, Crossley E. Jayewardene
This paper describes the design and implementation of a system for monitoring the performance of a critical dimension measurement scanning electron microscope (CD-SEM). Experiments were performed for tests involving diagnosis of the vacuum system and

Embedded Power Quality Solutions for Computer Numerical Control Machine Tools

January 1, 2001
Author(s)
Bradley N. Damazo, M Stephens, Johannes A. Soons, M A. Donmez
Electric Power Research Institute (EPRI) research and testing, conducted over many years, has indicated that variations in electric power quality can negatively impact end-use equipment. This research and testing has helped to form the theory that the

SEM Sentinel - SEM Performance Measurement System

January 1, 2001
Author(s)
Bradley N. Damazo, Andras Vladar, Alice V. Ling, M A. Donmez, Michael T. Postek, Crossley E. Jayewardene
This paper describes the design and implementation of a system for monitoring the performance of a critical dimension measurement scanning electron microscope (CD-SEM). Experiments were performed for tests involving diagnosis of the vacuum system and

Development of a Linear Motor Drive Testbed and Initial Thermal Behavior Results

October 1, 2000
Author(s)
Kari K. Harper, Bradley N. Damazo, M A. Donmez
The machine tool industry is moving toward using linear motors for both conventional and high speed machine tools due to many advantages: low maintenance, faster assembly times (compared with the more conventional ball screw drives), and improvements in

SEM Sentinel - SEM Performance Measurement System, Part 1

April 1, 2000
Author(s)
Alice V. Ling, Andras Vladar, Bradley N. Damazo, M A. Donmez, Michael T. Postek
This report describes the current design of a system for monitoring the performance of several major subsystems of a scanning electron microscope (SEM). The following subsystems and the associated functional parameters will be monitored. 1) Vacuum system

An Overview of Nano-Micro-Meso Scale Manufacturing at the NIST

March 13, 2000
Author(s)
E Amatucci, Nicholas Dagalakis, Bradley N. Damazo, Matthew A. Davies, John Evans, Jun-Feng Song, E C. Teague, Theodore V. Vorburger
The future of nano-, micro- and meso-scale manufacturing operations will be strongly influenced by a new breed of assembly and manufacturing tools that will be intelligent, flexible, more precise, include in-process production technologies and make use of