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Displaying 33326 - 33350 of 73960

Line Edge Roughness Characterization of Sub-50nm Structures Using CD-SAXS: Round-Robin Benchmark Results

January 1, 2007
Author(s)
Chengqing C. Wang, J C. Roberts, Robert Bristol, B Bunday, Ronald L. Jones, Eric K. Lin, Wen-Li Wu, John S. Villarrubia, Kwang-Woo Choi, James S. Clarke, Bryan J. Rice, Michael Leeson
he need to characterize line edge and line width roughness in patterns with sub-50 nm critical dimension challenges existing platforms based on electron microscopy and optical scatterometry. The development of x-ray based metrology platforms provides a

Linewidth Measurement Based on Automatically Matched and Stitched Images

January 1, 2007
Author(s)
Wei Chu, Joseph Fu, Ronald G. Dixson, Theodore V. Vorburger
The emergence of ultra-sharp carbon nanotube (CNT) tips provides a new approach to minimize the distortion of the measured linewidth profile caused by interaction with the fmite probe tip size. However, the inevitable tilt angle resulting from attaching

Long Term Knowledge Retention Workshop Summary

January 1, 2007
Author(s)
Joshua Lubell, Eswaran Subrahmanian, William Regli, Sudarsan Rachuri
This report summarizes the presentations, discussions and recommendations of a workshop held at the National Institute of Standards and Technology on March 15-16, 2006. The purpose of the workshop was to identify challenges, research, and implementation

Macrophage Response to Methacrylate Conversion Using a Gradient Approach

January 1, 2007
Author(s)
Nancy Lin, L A. Bailey, Matthew Becker, N. R. Washburn, Lori Henderson
Incomplete conversion, an ongoing challenge facing photopolymerized methacrylate-based polymers, affects leachables as well as the resulting network. As novel polymers and composites are developed, methods to efficiently screen cell response to these

Marine Environmental Specimen Bank: Clean Room and Specimen Bank Protocols

January 1, 2007
Author(s)
Rebecca S. Pugh, Michael B. Ellisor, Amanda J. Moors, Barbara J. Porter, Paul R. Becker
The National Biomonitoring Specimen Bank (NBSB) was established in 1979 from the pilot Environmental Specimen Bank Program and is maintained at the National Institute of Standards and Technology. Numerous research projects and programs have been developed
Displaying 33326 - 33350 of 73960
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