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Search Publications

NIST Authors in Bold

Displaying 30751 - 30775 of 74220

In Situ Gas Phase Diagnostics for Hafnium Oxide Atomic Layer Deposition

January 1, 2008
Author(s)
James E. Maslar, Wilbur S. Hurst, Donald R. Burgess Jr., William A. Kimes, Nhan V. Nguyen, Elizabeth F. Moore, Joseph T. Hodges
Atomic layer deposition (ALD) is an important method for depositing the nanometer-scale, conformal high  dielectric layers required for many nanoelectronics applications. In situ monitoring of ALD processes has the potential to yield insights that will

Integrating Sensors and Actuators into RFID Tags

January 1, 2008
Author(s)
Kang B. Lee, J T. Cain
The objective in this chapter is to present the current situation in RFID systems and networked transducers and to indicate the strategy that is taken and research that will be necessary to incorporate ?smart? sensors and actuators into existing RFID tags

Line Width Measurement Technique Using Through-Focus Optical Images

January 1, 2008
Author(s)
Ravikiran Attota, Richard M. Silver, Ronald G. Dixson
We present a detailed experimental study of a new through-focus technique to measure line width (CD) with nanometer sensitivity using a bright field optical microscope. This method relies on analyzing intensity gradients in optical images at different

Metrologies for Mechanical Response of Micro- and Nanoscale Systems

January 1, 2008
Author(s)
Robert Keller, Donna C. Hurley, David T. Read, Paul Rice
This chapter describes metrologies developed by NIST scientists and collaborators for mechanical properties of dimensionally-constrained materials; these approaches make use of methods inherently sensitive to small volumes. Attention is focused on

MODELING AND MEASURING THE ECONOMIC ROLES OF TECHNOLOGY INFRASTRUCTURE

January 1, 2008
Author(s)
Gregory C. Tassey
Designing and managing an economy’s technology infrastructure requires both accurate economic models and data to drive them. Previous models treat technology as a homogeneous entity, thereby precluding assessing investment barriers affecting infrastructure

Multi-Channel Mobile Ad-Hoc Links for Multimedia Communications

January 1, 2008
Author(s)
Hamid Gharavi
This paper is mainly concerned with multi-channel transmission of real-time information such as video over multi-hop ad-hoc links. We propose two multi-channel routing protocols. The first is based on single-path routing and aims at suppressing the intra

Neutron Self-Shielding Factors for Simple Geometries, Revisited

January 1, 2008
Author(s)
Richard M. Lindstrom, Ronald F. Fleming
To assure quality measurements, the algorithms used in data analysis need to be demonstrably correct. In practice, however, some less transparent or more complicated algorithms may be difficult to trace back to their original derivation. We point out that
Displaying 30751 - 30775 of 74220