March 17, 2026
Author(s)
Jodie Pope, Christopher Crowley, Max Low, John Wright, Aaron Johnson
… The National Institute of Standards and Technology (NIST) has developed the Semiconductor Low Flow … relative expanded uncertainties of 0.06 % and 0.12 % in flow, with the higher uncertainty attributed to the … with low uncertainty. Recognizing the limitations in characterizing very small volumes, we also compared the …