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Displaying 11126 - 11150 of 17277

Critical Dimension and Overlay Metrology

March 1, 2003
Author(s)
Michael T. Postek, Marylyn H. Bennett
… this case, is to develop the infrastructural metrology and standards for these semiconductor industry applications. NIST … years has produced a series of accurate optical photomask standards. Because of the nanometer sizes of devices in … for accurate metrology, as well as electrical metrology. Standards and metrology methodology for optical overlay …

Architecture for the Validation Testing System Software

January 1, 1992
Author(s)
Katherine C. Morris
This document is part of the National PDES Testbed Report Series and is intended to complement the other reports of the Validation Testing System (VTS) project. Other documents describe the methodology for model validation and software requirements for

IG3IS Urban Greenhouse Gas Emission Observation and Monitoring Best Research Practices

August 1, 2022
Author(s)
Jocelyn Turnbull, Philip DeCola, Kimberly Mueller, Felix Vogel, Anna Karion, Israel Lopez Coto, James Whetstone
… relationship between these Best Practice guidelines and "Standards". The metrology community is working in parallel to develop standards for urban greenhouse gas measurements. These Best … community developing emerging methods. Documentary standards will be the logical follow-on as best practices …

Nitrides in Materials Science: Some Thermodynamic Aspects

October 16, 2008
Author(s)
P A. O'Hare
Recent studies by fluorine bomb calorimetry are described that lead to the determination of the standard molar enthalpy of formation of silicon nitride, [Δ] fH m(Si 3N 4, 298.15 K). Initial experiments on the combustion of hexagonal and cubic boron nitride

Thermodynamic Properties of Air from 60 to 2000 K at Pressures up to 2000 Mpa

October 1, 1999
Author(s)
M D. Panasiti, Eric Lemmon, S G. Penoncello, R. T. Jacobsen, Daniel G. Friend
A thermodynamic property formulation for standard dry air based upon experimental P-p-T, heat capactiy, and speed of sound data and predicted values, which extends the range of prior formulations to higher pressures and temperatures, is presented.
Displaying 11126 - 11150 of 17277
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