November 1, 1999
Author(s)
John J. Hurly, Michael R. Moldover
We measured the speed of sound in the process gases Cl 2, HBr, BCl 3, and in the surrogate gases SF 6, CF 4, and C 2F 6. The data range up to 475 K (200 C) and from 25 kPa to 1500 kPa (or to 80% of the vapor pressure for condensable gases). The data were