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Scanning Electron Microscope Length Standards (Chapter VII in: Benchmarking the Length Measurement Capabilities of the National Institute of Standards and Technology, R.M. Silver, J.L. Land, Editors, NISTIR 6036)

Published

Author(s)

Michael T. Postek, Joseph Fu

Abstract

A cross-section of length measurement capabilities fiom the Precision Engineering Division within the National Institute of Standards and Technology is benchmarked against those of other leading National Measurement Institutes. We present a variety of length-related calibration senices and standard reference materials each of which are performed or calibrated by at least one means in the Precision Engineering Division. Measurement capabilities and uncertainties were solicited fiom the other leading national measurement institutions. These data are compared to NIST work in as equal a presentation as possible. The length traceability chain is identified fiom the defined speed of light and the cesium clock through the realization of the meter to actual length artifacts. We make comparisons at various stages of the traceability chain and document the dissemination of length in many application specific artifacts and measurement techniques such as photomasks, gage blocks, and roundness. In general, the uncertainties of PED/NIST compare quite favorably as benchmarked against the other leading national measurement institutes. Specific superior capabilities or weaknesses of PED/NIST are noted in the conclusion.
Citation
NIST Interagency/Internal Report (NISTIR) - 6036
Report Number
6036

Citation

Postek, M. and Fu, J. (1998), Scanning Electron Microscope Length Standards (Chapter VII in: Benchmarking the Length Measurement Capabilities of the National Institute of Standards and Technology, R.M. Silver, J.L. Land, Editors, NISTIR 6036), NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed June 22, 2024)

Issues

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Created January 1, 1998, Updated February 19, 2017