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Scanning Capacitance Microscopy Measurements and Modeling: Progress Towards Dopant Profiling of Silicon

Published

Author(s)

Joseph Kopanski, Jay F. Marchiando, J R. Lowney
Citation
Journal of Vacuum Science and Technology
Volume
B 14
Issue
1

Citation

Kopanski, J. , Marchiando, J. and Lowney, J. (1996), Scanning Capacitance Microscopy Measurements and Modeling: Progress Towards Dopant Profiling of Silicon, Journal of Vacuum Science and Technology (Accessed June 18, 2024)

Issues

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Created January 31, 1996, Updated October 12, 2021