@article{845966,
  author = {Joseph Kopanski and Jay Marchiando and J Lowney},
  title = {Scanning Capacitance Microscopy Measurements and Modeling: Progress Towards Dopant Profiling of Silicon},
  year = {1996},
  number = {B 14},
  month = {1996-02-01 00:02:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}