TY  - JOUR
AU  - Joseph Kopanski
AU  - Jay Marchiando
AU  - J Lowney
C2  - Journal of Vacuum Science and Technology
DA  - 1996-02-01 00:02:00
LA  - en
M1  - B 14
PB  - Journal of Vacuum Science and Technology
PY  - 1996
TI  - Scanning Capacitance Microscopy Measurements and Modeling: Progress Towards Dopant Profiling of Silicon
ER  -