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Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon

Published

Author(s)

Joseph Kopanski, Jay F. Marchiando, J R. Lowney
Proceedings Title
Semiconductor Characterization - Present Status and Future Needs
Conference Location
Gaithersburg, MD, USA

Citation

Kopanski, J. , Marchiando, J. and Lowney, J. (1996), Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon, Semiconductor Characterization - Present Status and Future Needs, Gaithersburg, MD, USA (Accessed June 22, 2024)

Issues

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Created December 30, 1996, Updated October 12, 2021