@conference{794151,
  author = {Joseph Kopanski and Jay Marchiando and J Lowney},
  title = {Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon},
  year = {1996},
  month = {1996-12-31 00:12:00},
  publisher = {Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA},
  language = {en},
}