TY  - CONF
AU  - Joseph Kopanski
AU  - Jay Marchiando
AU  - J Lowney
C2  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
DA  - 1996-12-31 00:12:00
LA  - en
PB  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
PY  - 1996
TI  - Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon
ER  -