Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors

Published

Author(s)

Joseph Kopanski, Jay F. Marchiando, J R. Lowney
Proceedings Title
Proc., 3rd International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies
Conference Dates
May 11-15, 1996
Conference Location
Freiburg, 1, GM

Citation

Kopanski, J. , Marchiando, J. and Lowney, J. (1997), Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors, Proc., 3rd International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies, Freiburg, 1, GM (Accessed February 21, 2024)
Created December 30, 1997, Updated October 12, 2021