@conference{847391,
  author = {Joseph Kopanski and Jay Marchiando and J Lowney},
  title = {Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors},
  year = {1997},
  month = {1997-12-31 00:12:00},
  publisher = {Proc., 3rd International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies, Freiburg, 1, GM},
  language = {en},
}