TY  - CONF
AU  - Kopanski, Joseph
AU  - Marchiando, Jay
AU  - Lowney, J
C2  - Proc., 3rd International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies, Freiburg, 1, GM
DA  - 1997-12-31 00:12:00
LA  - en
PB  - Proc., 3rd International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies, Freiburg, 1, GM
PY  - 1997
TI  - Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors
ER  -