Report of the Workshop: Nanometrology of Materials
P M. McGuiggan, Sheldon M. Wiederhorn
Probe microscopy is a class of techniques used worldwide to characterize properties and structures of materials. The techniques are especially good for examining materials locally for a wide range of material properties, including surface topology, surface tribology, elastic properties, ferroelectric donaim sturctures, electric potential and impedance at surfaces, and the atomic structure of crystals at surfaces. Because of the potential of probe microscopy for investigating the near surface properties of materials, a two-day workshop was held on this class of techniques. The primary purpose of the meeting was to familiarize NIST staff with the diverse ways in which the technique is being used.
atomic force microscopy, materials, nanometrology, workshop
and Wiederhorn, S.
Report of the Workshop: Nanometrology of Materials, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed June 5, 2023)