TY  - GEN
AU  - P McGuiggan
AU  - Sheldon Wiederhorn
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2008-10-16 14:10:19
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2008
TI  - Report of the Workshop: Nanometrology of Materials
ER  -