@misc{891011,
  author = {P McGuiggan and Sheldon Wiederhorn},
  title = {Report of the Workshop: Nanometrology of Materials},
  year = {2008},
  month = {2008-10-16 14:10:19},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}