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Reliability Monitoring For Highly Leaky Devices

Published

Author(s)

Jason T. Ryan, Jason P. Campbell, Kin P. Cheung, John S. Suehle, Richard Southwick, Anthony Oates

Abstract

We demonstrate a new charge pumping (CP) methodology, frequency modulated CP (FMCP), that robustly treats metrology challenges associated with high gate leakage current. By moving to an AC coupled measurement, we are able to easily resolve small CP signals despite excessively high gate leakage current backgrounds. We demonstrate the utility of FMCP as a reliability monitoring tool in highly scaled and highly leaky devices.
Proceedings Title
Proceedings of the IEEE International Reliability Physics Symposium
Conference Dates
April 15-18, 2013
Conference Location
Monterey, CA
Conference Title
IEEE International Reliability Physics Symposium

Citation

Ryan, J. , Campbell, J. , Cheung, K. , Suehle, J. , Southwick, R. and Oates, A. (2013), Reliability Monitoring For Highly Leaky Devices, Proceedings of the IEEE International Reliability Physics Symposium, Monterey, CA (Accessed August 10, 2022)
Created May 31, 2013, Updated February 19, 2017