Zaghloul, M.
, Novotny, D.
, Tyree, V.
, Pi, J.
, Pi��, C.
and Hansford, W.
(1994),
Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.5402
(Accessed July 26, 2024)
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Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service:
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- NIST IR 5402
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NIST IR 5402
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NIST Pubs
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Created January 1, 1994, Updated May 19, 2023