Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service:

Published

Author(s)

M Zaghloul, D Novotny, V Tyree, J -I Pi, C Pi��, W Hansford
Citation
- NIST IR 5402
Report Number
NIST IR 5402

Citation

Zaghloul, M. , Novotny, D. , Tyree, V. , Pi, J. , Pi��, C. and Hansford, W. (1994), Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.5402 (Accessed June 12, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1994, Updated May 19, 2023