@misc{1147011,
  author = {M Zaghloul and D Novotny and V Tyree and J -I Pi and C Pi�� and W Hansford},
  title = {Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service:},
  year = {1994},
  month = {1994-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.5402},
  language = {en},
}