TY  - GEN
AU  - Zaghloul, M
AU  - Novotny, D
AU  - Tyree, V
AU  - Pi, J -I
AU  - Pi��, C
AU  - Hansford, W
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1994-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.5402
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1994
TI  - Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service:
ER  -