Cassard, J.
, Gaitan, M.
, Zaghloul, M.
, Novotny, D.
, Tyree, V.
, Pi, J.
, Pina, C.
and Hansford, W.
(1994),
Realizing Suspended Structures on Chips Fabricated by CMOS Foundry Processes through the MOSIS Service, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed April 23, 2024)
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Realizing Suspended Structures on Chips Fabricated by CMOS Foundry Processes through the MOSIS Service
Published
Author(s)
, , , Donald B. Novotny, V. C. Tyree, J. I. Pi, C. Pina, W. Hansford
Citation
NIST Interagency/Internal Report (NISTIR) -
Volume
5402
NIST Pub Series
Pub Type
NIST Pubs
Citation
Created May 31, 1994, Updated October 12, 2021