@misc{765776,
  author = {Janet Cassard and Michael Gaitan and Mona Zaghloul and Donald Novotny and V. Tyree and J. Pi and C. Pina and W. Hansford},
  title = {Realizing Suspended Structures on Chips Fabricated by CMOS Foundry Processes through the MOSIS Service},
  year = {1994},
  number = {5402},
  month = {1994-06-01 00:06:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}