TY  - GEN
AU  - Janet Cassard
AU  - Michael Gaitan
AU  - Mona Zaghloul
AU  - Donald Novotny
AU  - V. Tyree
AU  - J. Pi
AU  - C. Pina
AU  - W. Hansford
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1994-06-01 00:06:00
LA  - en
M1  - 5402
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1994
TI  - Realizing Suspended Structures on Chips Fabricated by CMOS Foundry Processes through the MOSIS Service
ER  -