The real time shape of nanoimprinted polymer patterns are measured as a function of annealing temperature and time using a new metrology technique, Critical Dimension Small Angle X-ray Scattering (CD-SAXS). Periodicity, linewidth, line height, and sidewall angle are reported both below and above the bulk glass transition temperature (TG) for a nanoimprinted line/space pattern of poly(methyl methacrylate) (PMMA). For T > TG, shape changes are accelerated in early stages due to the reduction of high energy corners, yielding to a slowed rate in longer time regimes.
Citation: Nano Letters
Pub Type: Journals
dimensional metrology, glass transition temperature, Nanoimprint Lithography, nanomechanics, small angle x-ray scattering