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Progress on Implementation of a Reference Measurement System based on a Critical-dimension Atomic Force Microscope

Published

Author(s)

Ndubuisi G. Orji, Angela Martinez, B Bunday, J Allgair, Theodore V. Vorburger
Citation
J. Micro/Nanolith
Volume
6
Issue
2

Citation

Orji, N. , Martinez, A. , Bunday, B. , Allgair, J. and Vorburger, T. (2007), Progress on Implementation of a Reference Measurement System based on a Critical-dimension Atomic Force Microscope, J. Micro/Nanolith (Accessed April 20, 2024)
Created April 1, 2007, Updated February 19, 2017