@article{95261,
  author = {Ndubuisi Orji and Angela Martinez and B Bunday and J Allgair and Theodore Vorburger},
  title = {Progress on Implementation of a Reference Measurement System based on a Critical-dimension Atomic Force Microscope},
  year = {2007},
  number = {6},
  month = {2007-04-01},
  publisher = {J. Micro/Nanolith},
  language = {en},
}