TY  - JOUR
AU  - Ndubuisi Orji
AU  - Angela Martinez
AU  - B Bunday
AU  - J Allgair
AU  - Theodore Vorburger
C2  - J. Micro/Nanolith
DA  - 2007-04-01
LA  - en
M1  - 6
PB  - J. Micro/Nanolith
PY  - 2007
TI  - Progress on Implementation of a Reference Measurement System based on a Critical-dimension Atomic Force Microscope
ER  -