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Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version

Published

Author(s)

Joseph Kopanski, Jay F. Marchiando, R. Alvis
Proceedings Title
Extended Abstracts of the Electrochemical Society
Conference Dates
May 4-9, 1997
Conference Location
Montreal, 1, CA

Citation

Kopanski, J. , Marchiando, J. and Alvis, R. (1997), Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version, Extended Abstracts of the Electrochemical Society, Montreal, 1, CA (Accessed February 27, 2024)
Created December 30, 1997, Updated October 12, 2021