TY  - CONF
AU  - Joseph Kopanski
AU  - Jay Marchiando
AU  - R. Alvis
C2  - Extended Abstracts of the Electrochemical Society, Montreal, 1, CA
DA  - 1997-12-31 00:12:00
LA  - en
PB  - Extended Abstracts of the Electrochemical Society, Montreal, 1, CA
PY  - 1997
TI  - Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version
ER  -