@conference{794146,
  author = {Joseph Kopanski and Jay Marchiando and R. Alvis},
  title = {Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version},
  year = {1997},
  month = {1997-12-31 00:12:00},
  publisher = {Extended Abstracts of the Electrochemical Society, Montreal, 1, CA},
  language = {en},
}